Fluoro Sponge
Siloxane free, low output gas compatible sponge
Features
- Heat resistant, can be used at 200°
- Excellent chemical resistance
- Non-combustible (equivalent to UL94/V0)
Applications
As embedded material
- Gasket and sealing material for semiconductor and liquid crystal photolithography equipment (stepper)
- Packing material for transportation of parts of liquid crystal photolithography equipment
- Fuel cell flange packing
- Cushion material in the flat panel (cover glass) laminating equipment
- Sealing material in the conveyer system used in semiconductor factories
- Packing material for preventing leakage from clearance in semiconductor vacuum equipment
- Packing material in the heater of toilet seat
As test and inspection equipment material
- Cushion material in the experimental devices used outside space station
- Thermal insulation and cushion material in semiconductor device testing equipment
- Adsorption pad material in electronic board and imaging device
As secondary material in product
- Cushion material for hot press in FPC (flexible printed circuit) production
- Suction paid of vacuum equipment
- Filter and adsorption pad material in plants that use chemicals
- Cushion material for up-and-down bed in hot press
